For citations:
Yerokhin M.N., Kazantsev S.P., Chupyatov N.N. TECHNOLOGICAL EQUIPMENT FOR OBTAINING METAL COATINGS BY DECOMPOSING METALORGANIC COMPOUNDS WITH CVD METHOD. Agricultural Engineering (Moscow). 2018;(6):40-44. (In Russ.) https://doi.org/10.26897/1728-7936-2018-6-40-44